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On chip growth of semiconductor metal oxide nanowires for gas sensors a review

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Nội dung chi tiết: On chip growth of semiconductor metal oxide nanowires for gas sensors a review

On chip growth of semiconductor metal oxide nanowires for gas sensors a review

Accepted ManuscriptOn-chip growth of semiconductor metal oxide nanowires for gas sensors. A reviewChu Manh Hung. Dang Thi Thanh Le. Nguyen Van HieuPll

On chip growth of semiconductor metal oxide nanowires for gas sensors a review l:S2468-2179(17)30130-2DOI:10.1016/j jsamd.2017.07.009Reference-JSAMD 113To appear in:Journal of Science: Advanced Materials and DevicesReceived Date.

10 July 2017Revised Date. 27 July 2017Accepted Date. 31 July 2017Please cite this article as. C.M. Hung. D.T.T. Le. N. Van Hieu. On-chip growth of se On chip growth of semiconductor metal oxide nanowires for gas sensors a review

miconductor metal oxide nanowires for gas sensors. A review. Journal of Science: Advanced Materials and Devices (2017), dot: 10 1016/j jsamd 2017.07 0

On chip growth of semiconductor metal oxide nanowires for gas sensors a review

09This IS a PDF file of an unedited manuscnpt that has been accepted for publication As a service to our customers we are providing this early version

Accepted ManuscriptOn-chip growth of semiconductor metal oxide nanowires for gas sensors. A reviewChu Manh Hung. Dang Thi Thanh Le. Nguyen Van HieuPll

On chip growth of semiconductor metal oxide nanowires for gas sensors a review lease note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the jou

rnal pertainACCEPTED MANUSCRIPTOn-chip growth of semiconductor metal oxide nanowires for gas sensors: A reviewChu Manh Iluug. Dang Thi Thanh Le, Nguye On chip growth of semiconductor metal oxide nanowires for gas sensors a review

n Van HieuInternational Training Institute for Materials Science (ITIMS). Hanoi University of Science and Technology (HƯST), No.l, Dai Co Viet, Hanoi,

On chip growth of semiconductor metal oxide nanowires for gas sensors a review

VietnamAbstract: A semiconductor metal oxide nanowires (SMO-NWs) shows potential for novel gas sensor applications because of its distinct properties

Accepted ManuscriptOn-chip growth of semiconductor metal oxide nanowires for gas sensors. A reviewChu Manh Hung. Dang Thi Thanh Le. Nguyen Van HieuPll

On chip growth of semiconductor metal oxide nanowires for gas sensors a review nfigured as resistors or field-effect transistors for gas detection, and different configurations, such as single NW. multiple NWs. and networked NW f

ilms, have been established. A surface-functionalizing NWs with catalyst elements and a self-healingmH* ,NWs provides other options for highly selecti On chip growth of semiconductor metal oxide nanowires for gas sensors a review

ve and low-power consumption gas sensors. However, an appropriate design and integration of SMO-NWs should also be considered to enhance the gas-sensi

On chip growth of semiconductor metal oxide nanowires for gas sensors a review

ng performance of SMO-NW sensors. The on-chip growth of SMO-NWs exhibits many advantages and thus can be effectively used for the large-scale fabricat

Accepted ManuscriptOn-chip growth of semiconductor metal oxide nanowires for gas sensors. A reviewChu Manh Hung. Dang Thi Thanh Le. Nguyen Van HieuPll

On chip growth of semiconductor metal oxide nanowires for gas sensors a review CuO, and other SMO-NW sensors. This review also discusses the promising approaches that help develop the on-chip fabrication of SMO-NWs-based gas sens

ors and other NWs-based devices.Keywords: On-chip growth. Gas sensors, Nanowires, Nanosensors, Meta! oxides' Corresponding authorhieu@ituns.edu.vn hie On chip growth of semiconductor metal oxide nanowires for gas sensors a review

u.nguvenvan@itiins.edu.vnSubmitted to Journal of Science: Advanced Materials and DevicesTED MANUSCRIPT1. IntroductionNanostructured materials are clas

On chip growth of semiconductor metal oxide nanowires for gas sensors a review

sified into three categories, namely, zero-dimensional structures (e.g., nanoparticles), one-dimensional (ID) structures (e.g.. NW. nanobells [NB], an

Accepted ManuscriptOn-chip growth of semiconductor metal oxide nanowires for gas sensors. A reviewChu Manh Hung. Dang Thi Thanh Le. Nguyen Van HieuPll

On chip growth of semiconductor metal oxide nanowires for gas sensors a review R. have been extensively investigated since carbon nanotubes were found in 1991 [2]. NWs, which belongs to the group of ID nanostructures, is characte

rized by a diameter of 1-100 mn [3]. An important property of NWs is that carriers are only conducted in one dimension; conversely, the two other dime On chip growth of semiconductor metal oxide nanowires for gas sensors a review

nsions are quantum confined because of their nanoscale size [4]. In addition to a large specific surface area, a Debye thickness of 1-10 nm is observe

On chip growth of semiconductor metal oxide nanowires for gas sensors a review

d in NWs because of its nanoscale size, which should be considered in comparison to its diameter when surface effects are examined. Among NW materials

Accepted ManuscriptOn-chip growth of semiconductor metal oxide nanowires for gas sensors. A reviewChu Manh Hung. Dang Thi Thanh Le. Nguyen Van HieuPll

On chip growth of semiconductor metal oxide nanowires for gas sensors a review s reported the probability of fabricating various metal oxide nanobelts through thermal evaporation [7], Various types of SMO-NWs. such as SnOi, ZnO.

TiO>, wo3.1112O3, and NWs. have been prepared using the same method [5]. Studies on many distinct physicochemical properties of SMO-NWs have revealed On chip growth of semiconductor metal oxide nanowires for gas sensors a review

that SMO-NWs presents a strong potential for applications in electronic nanodevices, optoelectronic devices, and nanosensors [2.4-6],The gas-sensing p

On chip growth of semiconductor metal oxide nanowires for gas sensors a review

roperties of SMO-NWs have been extensively studied to detect toxic gases. SMO-NWs exhibits novel properties, which are much greater than those of its

Accepted ManuscriptOn-chip growth of semiconductor metal oxide nanowires for gas sensors. A reviewChu Manh Hung. Dang Thi Thanh Le. Nguyen Van HieuPll

On chip growth of semiconductor metal oxide nanowires for gas sensors a review to be successfully developed and commercialized. To our best knowledge. SMO-NW applications are limited by the lack of an efficient method to integrat

e SMO-NWs on functional substrates for mass production with goodSubmitted to Journal of Science: Advanced Materials and DevicesACCEPTED MANUSCRIPTrepe On chip growth of semiconductor metal oxide nanowires for gas sensors a review

atability and reasonable cost. In early research stage. SMO-NWs-based devices are commonly fabricated using pick and place [10]. In this fabrication m

On chip growth of semiconductor metal oxide nanowires for gas sensors a review

ethod. NWs grown on a substrate or in a solution are initially dispersed in a volatile solvent and then deposited on functional substrates through spi

Accepted ManuscriptOn-chip growth of semiconductor metal oxide nanowires for gas sensors. A reviewChu Manh Hung. Dang Thi Thanh Le. Nguyen Van HieuPll

On chip growth of semiconductor metal oxide nanowires for gas sensors a review aphy, sputtering, and lift-off. Although this process is frequently used for fundamental research on a laboratory scale, researchers generally experie

nce difficulties in applying this process to fabricate gas sensors for mass production with good repeatability and acceptable price. Technologies inte On chip growth of semiconductor metal oxide nanowires for gas sensors a review

grating NWs on functional substrates have been widely investigated, and relevant results have been obtained [11-13]. The proposed techniques for the m

On chip growth of semiconductor metal oxide nanowires for gas sensors a review

ass production of SMO-NW gas sensors are divided into two groups: on-chip or direct methods and off-chip or indirect approaches [11]. This paper aims

Accepted ManuscriptOn-chip growth of semiconductor metal oxide nanowires for gas sensors. A reviewChu Manh Hung. Dang Thi Thanh Le. Nguyen Van HieuPll

On chip growth of semiconductor metal oxide nanowires for gas sensors a review s-sensing properties of SMO-NW sensorsSMO-NWs have been widely investigated as gas sensors because of its typical characteristics, such as high surtac

e-to-volume ratio, high crystallinity, and quantum size in two dimensions and other dimensions for electron conduction. Thus, SMO-NWs are optimum plat On chip growth of semiconductor metal oxide nanowires for gas sensors a review

forms for the development of novel chemical sensors [2.6.14]. Studies on gas sensor applications of SMO-NWs are summarized in Table 1.Table 1. Outstan

On chip growth of semiconductor metal oxide nanowires for gas sensors a review

ding works performed on SMO-NWs gas sensors science 2002.

Accepted ManuscriptOn-chip growth of semiconductor metal oxide nanowires for gas sensors. A reviewChu Manh Hung. Dang Thi Thanh Le. Nguyen Van HieuPll

Accepted ManuscriptOn-chip growth of semiconductor metal oxide nanowires for gas sensors. A reviewChu Manh Hung. Dang Thi Thanh Le. Nguyen Van HieuPll

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