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Nano and micro electromechanical systems fundamentals of nano and microengineering sergey edward lyshevski

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Nội dung chi tiết: Nano and micro electromechanical systems fundamentals of nano and microengineering sergey edward lyshevski

Nano and micro electromechanical systems fundamentals of nano and microengineering sergey edward lyshevski

Cop/ìtghtrd IX^cn.ìlNano- and MicroElectromechanical SystemsFundamentals ofNano- and MicroengineeringSergey Edward LyshevskiNANO-AND ÌROELECTRONECHANI

Nano and micro electromechanical systems fundamentals of nano and microengineering sergey edward lyshevski ICAL SYSTEMSFundamentals of Nano- and MicroengineeringA book in theNano- and Microscience, Engineering, Technology and Medicine SeriesWANDMICROELECTRO

MECHANICALSYSTEMSFundamentals ofNano- and MicroengineeringSergey Edward LyshevskiCRC PressBoca Raton London New York Washington. D.c.Library of Congre Nano and micro electromechanical systems fundamentals of nano and microengineering sergey edward lyshevski

ss Calaloging-in-Publication DataLyshevski. Sergey Edward.Nano- and inicroelcetrornechanical systems : fundamentals of nano- and mierocngineering / Se

Nano and micro electromechanical systems fundamentals of nano and microengineering sergey edward lyshevski

rgey Edward Lyshevski.p. cm. - (Nano- and microscience, engineering, technology, and medicine series)Includes index.Includes bibliographical reference

Cop/ìtghtrd IX^cn.ìlNano- and MicroElectromechanical SystemsFundamentals ofNano- and MicroengineeringSergey Edward LyshevskiNANO-AND ÌROELECTRONECHANI

Nano and micro electromechanical systems fundamentals of nano and microengineering sergey edward lyshevski ik contains information obtained from authentic and highly regarded sources. Reprinted material is quoted with permission, and sources arc indicated.

A wide variety of references arc listed. Reasonable efforts have been made to publish reliable data and information, but the author and the publisher Nano and micro electromechanical systems fundamentals of nano and microengineering sergey edward lyshevski

cannot assume responsibility for the validity of all materials or for the consequences of their use.Neither this book nor any part may be reproduced o

Nano and micro electromechanical systems fundamentals of nano and microengineering sergey edward lyshevski

r transmitted in any form or by any means, electronic or mechanical, including photocopying, microfilming, and recording, or by any information storag

Cop/ìtghtrd IX^cn.ìlNano- and MicroElectromechanical SystemsFundamentals ofNano- and MicroengineeringSergey Edward LyshevskiNANO-AND ÌROELECTRONECHANI

Nano and micro electromechanical systems fundamentals of nano and microengineering sergey edward lyshevski istribution, for promotion, for creating new works, or for resale, specific permission must be obtained tn writing from CRC Press LLC for such copying

.Direct all inquiries to CRC Press LLC. 2000 N.w. Corporate Blvd.. Boca Raton. Florida 33431.Trademark Notice: Product or corporate names may be trade Nano and micro electromechanical systems fundamentals of nano and microengineering sergey edward lyshevski

marks or registered trademarks, and arc used only for identification and explanation, without intent to infringe.© 2001 by CRC Press LLCNo claim to or

Nano and micro electromechanical systems fundamentals of nano and microengineering sergey edward lyshevski

iginal U.S. Government works International Standard Book Number 0-8493-916-6 Library of Congress Card Number 00-057953

Cop/ìtghtrd IX^cn.ìlNano- and MicroElectromechanical SystemsFundamentals ofNano- and MicroengineeringSergey Edward LyshevskiNANO-AND ÌROELECTRONECHANI

Cop/ìtghtrd IX^cn.ìlNano- and MicroElectromechanical SystemsFundamentals ofNano- and MicroengineeringSergey Edward LyshevskiNANO-AND ÌROELECTRONECHANI

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