Optimization of fabrication parameters of barium doped pb zr0 52ti0 48 o3 thin films on ti si substrates using pulsed laser deposition

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Optimization of fabrication parameters of barium doped pb zr0 52ti0 48 o3 thin films on ti si substrates using pulsed laser deposition

BỌ GIÁO DỤC VÀ ĐÀO TẠO TRƯỜNG ĐẠI HỌC BÁCH KHOA HÀ NỘIPhạm Ngọc ThảoTÓI ứu HÓA QUÁ TRÌNH LẢNG DỌNG MÀNG MỎNG Pb(Zr0.52Tio 4S)O5 TRẼN ĐẾ TiN/Si sử DỤNG

Optimization of fabrication parameters of barium doped pb zr0 52ti0 48 o3 thin films on ti si substrates using pulsed laser deposition G PHƯƠNG PHẤP BÓC BAY XUNG LASERChuyên ngành : Khoa học vả kỳ thuật Vật liệu Điện tửLUẬN VÀN THẠC sì KHOA HOC(Khoa học vã kỳ thuật Vật liệu Điện tử)NG

ƯỜI HƯỚNG DÁN KHOA HỌC :1TS. Nguyễn Đức Minh2PGS. TS. Vũ Ngọc HùngHà Nội-2013DEDICATIONThe work has been carried out in the internship program at Solu Optimization of fabrication parameters of barium doped pb zr0 52ti0 48 o3 thin films on ti si substrates using pulsed laser deposition

tions in Material Science (SolMateS) company, the Netherlands, from r’ April to 30th September. 2013. Except where specific references are made, this

Optimization of fabrication parameters of barium doped pb zr0 52ti0 48 o3 thin films on ti si substrates using pulsed laser deposition

thesis is entirely the result of my own work and includes nothing that is the outcome of work done in collaboration. No part of this work has been or

Optimization of fabrication parameters of barium doped pb zr0 52ti0 48 o3 thin films on ti si substrates using pulsed laser deposition ork is done in following the internship program al Solutions in Material Science (SolMateS) company from I ■" April to .30th September. 2013.1 would l

ike to express my gratitude to my supervisor Assoc. Prof. Vu Ngoc Hung, who offered me die invaluable guidance, supports in my two years study and res Optimization of fabrication parameters of barium doped pb zr0 52ti0 48 o3 thin films on ti si substrates using pulsed laser deposition

earch at International Training Institute for Materials Science (1T1MS). Hanoi University of Science and Technology (1IƯST), Vietnam.Ĩ am deeply indeb

Optimization of fabrication parameters of barium doped pb zr0 52ti0 48 o3 thin films on ti si substrates using pulsed laser deposition

ted to my supervisor Dr. Nguyen Due Minh (ĨTĨMS & SolMateS), who gave me a precious opportunity to the beautiful city-Enschede. The Netherlands-to joi

Optimization of fabrication parameters of barium doped pb zr0 52ti0 48 o3 thin films on ti si substrates using pulsed laser deposition work, giving constructive advices throughout this research and thesis writing.I am very gratetill to Dr. Matthijn Dekkers (SolMateS) for the long sup

port, encouragement and his suggestions for this thesis. With his help. 1 have an opportunity to understand about working in a research cnviromcnl of Optimization of fabrication parameters of barium doped pb zr0 52ti0 48 o3 thin films on ti si substrates using pulsed laser deposition

the commerica] company, like SolMateS.Special acknowledgments to all members of SolMalcS company who created friendly work environment, and gave me en

Optimization of fabrication parameters of barium doped pb zr0 52ti0 48 o3 thin films on ti si substrates using pulsed laser deposition

couraging supports. Their interest, and hard working to the work impress me so much. It is my honor to work with all of them. Dear Nicolas, thanks for

Optimization of fabrication parameters of barium doped pb zr0 52ti0 48 o3 thin films on ti si substrates using pulsed laser deposition n assistance. Dear Jan. 1 have really enjoyed lime we spent together in talking about the ships and Dutch culture. Dear Steven, thanks for your warm f

riendship.iiI would like to thank sincerely to all the teachers who taught me at ITIMS such Prof. Dr. Than Due Hien. Assoc. Prof. Dr. Nguyen Van Hieu. Optimization of fabrication parameters of barium doped pb zr0 52ti0 48 o3 thin films on ti si substrates using pulsed laser deposition

Assoc. Prof. Dr. Nguyen Phuc Duong. Assoc. Prof. Dr. Nguyen Anh Tuan, Dr. Tran Ngoc Khiem, Dr. Nguyen Van Quy... Many thanks to ITIMS employees for a

Optimization of fabrication parameters of barium doped pb zr0 52ti0 48 o3 thin films on ti si substrates using pulsed laser deposition

lways supporting me such Dr. Thanh. Dr. Toan. Dr. Ngoc Anh. Dr. Ha. Ms Loan. Ms Lan. Dr. Le. Dr. Xuan... And thanks go to all members of MEMS group su

Optimization of fabrication parameters of barium doped pb zr0 52ti0 48 o3 thin films on ti si substrates using pulsed laser deposition ieu’s family, Chung (UvA), Bay (UvA). big cat Tom Aarnink (ƯT). Boota (UT), Nirupam (ƯT), Kenan (ƯT)... because of your warm and wondertill encouragem

ent to me.Last but not least. I would like to thank to my parents and my sister for their endless love, support, motivations: all of my friends in Vie Optimization of fabrication parameters of barium doped pb zr0 52ti0 48 o3 thin films on ti si substrates using pulsed laser deposition

t Nam for their friendship.This work was financially supported by Vietnam National Foundation for Science and Technology Development (NAFOSTED) under

Optimization of fabrication parameters of barium doped pb zr0 52ti0 48 o3 thin films on ti si substrates using pulsed laser deposition

Grant number 103.02-2011.43. and by the Interreg project "Unihealth".Enschede. September 2013.Pham Ngoc ThaoiiiTABLE OF CONTENTSDEDICATION............

Optimization of fabrication parameters of barium doped pb zr0 52ti0 48 o3 thin films on ti si substrates using pulsed laser deposition ........................ivLIST OF FIGURES...............................................viii