Modeling Simulation And Optimization Of Diamond Disc Pad Condit
➤ Gửi thông báo lỗi ⚠️ Báo cáo tài liệu vi phạmNội dung chi tiết: Modeling Simulation And Optimization Of Diamond Disc Pad Condit
Modeling Simulation And Optimization Of Diamond Disc Pad Condit
North Carolina Agricultural and Technical state UniversityAggie Digital Collections and ScholarshipDissertationsElectronic Theses and Dissertations201 Modeling Simulation And Optimization Of Diamond Disc Pad Condit12Modeling, Simulation, And Optimization Of Diamond Disc PadConditioning In Chemical Mechanical PolishingEmmanuel Ayensu BaisieNorth Carolina Agricultural and Technical State UniversityFollow this and additional works at: https //digital.Iibrary.ncat.edu/dissertationsRecommended CitationBaisie, Emma Modeling Simulation And Optimization Of Diamond Disc Pad Conditnuel Ayensu, 'Modeling, Simulation, And Optimization Of Diamond Disc Pad Conditioning In Chemical Mechanical Polishing' (2012). Dissertations. 37.httpModeling Simulation And Optimization Of Diamond Disc Pad Condit
s://digital.library.ncat edu/dissertations/37This Dissertation is brought to you for free and open access by the Electronic Theses and Dissertations aNorth Carolina Agricultural and Technical state UniversityAggie Digital Collections and ScholarshipDissertationsElectronic Theses and Dissertations201 Modeling Simulation And Optimization Of Diamond Disc Pad Conditctions and Scholarship. For more information, please contact iyanna@ncat edu.MODELING. SIMULATION. AND OPTIMIZATION OFDIAMOND DISC PAD CONDITIONING IN CHEMICAL MECHANICAL POLISHINGbyEmmanuel Ayensu BaisieA dissertation submitted to the graduate faculty in partial fulfillment of the requirements for Modeling Simulation And Optimization Of Diamond Disc Pad Conditthe degree of DOCTOR OF PHILOSOPHYDepartment: Industrial and Systems Engineering Major: Industrial and Systems Engineering Major Professor: Dr. ZhichaModeling Simulation And Optimization Of Diamond Disc Pad Condit
o LiNorth Carolina A&T State University Greensboro. North Carolina 2012ABSTRACTBahfe, Emmanuel Ayensu. MODELING, SIMULATION, AND OPTIMIZATION OF DIAMONorth Carolina Agricultural and Technical state UniversityAggie Digital Collections and ScholarshipDissertationsElectronic Theses and Dissertations201 Modeling Simulation And Optimization Of Diamond Disc Pad Conditity.Chemical Mechanical Polishing (CMP) is a major manufacturing step extensively used to planarize and smooth silicon walers upon which semiconductor devices arc built. In CMP. the polishing pad surface is glazed by residues as the process progresses. Typically, a diamond disc conditioner is used t Modeling Simulation And Optimization Of Diamond Disc Pad Condito dress the pad to regenerate newer pad asperity and a desired surface profile in order to maintain favorable process conditions.Conditioner selectionModeling Simulation And Optimization Of Diamond Disc Pad Condit
and the determination of the optimal conditioning parameter values to yield a desired pad surface still remain difficult problems. Various analyticalNorth Carolina Agricultural and Technical state UniversityAggie Digital Collections and ScholarshipDissertationsElectronic Theses and Dissertations201 Modeling Simulation And Optimization Of Diamond Disc Pad Conditr and pad design features in these analytical models. This research sought to address the concern about the lack of models that arc reliable enough to be used for verification and optimization of the process.In this research, two kinematic models were developed to predict the pad surface profile due Modeling Simulation And Optimization Of Diamond Disc Pad Condit to conditioning. One model was developed using a surface clement approach and the other by characterizing the diamond disc conditioning density distrModeling Simulation And Optimization Of Diamond Disc Pad Condit
ibution. Three metrics: Total Thickness Variation. Bow. and Non-Uniformity, were defined and utilized to evaluate the resulting pad surface profile chNorth Carolina Agricultural and Technical state UniversityAggie Digital Collections and ScholarshipDissertationsElectronic Theses and Dissertations201 Modeling Simulation And Optimization Of Diamond Disc Pad Conditt the pad surface profile. However, a slightly skewed deviation of the simulation results corroborated the suspicion that, deformation of the microporous pad could affect the pad surface profile.Thus, a 2-D image processing procedure was developed to characterize the morphological and mechanical pro Modeling Simulation And Optimization Of Diamond Disc Pad Conditperties of microporous Class-Ill CMP pads. Pad characterization data was incorporated into a 2-D axisymmetric quasi-static finite element model to invModeling Simulation And Optimization Of Diamond Disc Pad Condit
estigate effects of process parameters such as stack height, pad stiffness, and conditioning pressure on the pad deformation with enhanced fidelity. SNorth Carolina Agricultural and Technical state UniversityAggie Digital Collections and ScholarshipDissertationsElectronic Theses and Dissertations201 Modeling Simulation And Optimization Of Diamond Disc Pad Conditr design also has a significant effect on the pad conditioning process, a new metric to evaluate the pad surface texture generated by a specific conditioner design was developed. The metric was applied in a genetic algorithm (GA) to optimize conditioner design parameters including geometric arrangem Modeling Simulation And Optimization Of Diamond Disc Pad Conditent of diamonds, grit density and disc size. The GA model was able to find design parameter values that produced better CMP pad surface textures.SchooModeling Simulation And Optimization Of Diamond Disc Pad Condit
l of Graduate StudiesNorth Carolina Agricultural and Technical State UniversityThis is to certify that the Doctoral Dissertation ofEmmanuel Ayensu BaiNorth Carolina Agricultural and Technical state UniversityAggie Digital Collections and ScholarshipDissertationsElectronic Theses and Dissertations201North Carolina Agricultural and Technical state UniversityAggie Digital Collections and ScholarshipDissertationsElectronic Theses and Dissertations201Gọi ngay
Chat zalo
Facebook