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Integration technologies for 2D materials ieee techrxiv

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Integration technologies for 2D materials ieee techrxiv

TEchRxJyPowered by IEEEFabrication techniques for the integration of 2D materialsThis paper was downloaded from TechRxiv (https://www.techrxiv.org).LI

Integration technologies for 2D materials ieee techrxivICENSEcc BY 4.0SUBMISSION DATE / POSTED DATE17-11-2021 /19-11-2021CITATIONMoss, David (2021): Fabrication techniques for the integration of 2D materia

ls TechRxiv. Preprint.https://doi.org/10.36227/techrxiv.17035937.v1DOI10.36227/techrxiv,17035937,v1Fabrication techniques for the integration of 2D ma Integration technologies for 2D materials ieee techrxiv

terialsLinnan Jia1, Jiayang Wu1’*, Yuning Zhang1, Yang Qu1, Baohua Jicr, zhigang Chen31, and David J. Moss1*’Optical Sciences Centre. Swinburne Univer

Integration technologies for 2D materials ieee techrxiv

sity of Technolog}-. Hawthorn. VIC 3122. Australia-Centre for Translational Atoinaterials. Swinburne University of Technology. Haulhorn. VIC 3122. Aus

TEchRxJyPowered by IEEEFabrication techniques for the integration of 2D materialsThis paper was downloaded from TechRxiv (https://www.techrxiv.org).LI

Integration technologies for 2D materials ieee techrxiv China‘Department of Physics and Astronomy. San Francisco State University. San Francisco. CA 94132. USA •*E-mail: ỉiavmigivu(ậswiit. edttơu, dìHộsyĩị

win edit ailKeywords: 2D materials, integrated devices, fabrication techniques, heterostructures.AbstractWith compact footprint, low energy consumpti Integration technologies for 2D materials ieee techrxiv

on, high scalability, and mass producibility. chip-scale integrated devices are an indispensable part of modern technological change and development.

Integration technologies for 2D materials ieee techrxiv

Recent advances in two-dimensional (2D) layered materials with their unique structures and distinctive properties have motivated their on-chip integra

TEchRxJyPowered by IEEEFabrication techniques for the integration of 2D materialsThis paper was downloaded from TechRxiv (https://www.techrxiv.org).LI

Integration technologies for 2D materials ieee techrxivt requires a diverse range of device fabrication techniques, which are of fundamental importance to achieve good performance and high reproducibility.

This paper reviews the state-of-art fabrication techniques for the on-chip integration of 2D materials. First, an overview of the material properties Integration technologies for 2D materials ieee techrxiv

and on-chip applications of 2D materials is provided. Second, different approaches used for integrating 2D materials on chips are comprehensively rev

Integration technologies for 2D materials ieee techrxiv

iewed, which are categorized into material synthesis, on-chip transfer, film patterning, and property tuning / modification. Third, the methods for in

TEchRxJyPowered by IEEEFabrication techniques for the integration of 2D materialsThis paper was downloaded from TechRxiv (https://www.techrxiv.org).LI

Integration technologies for 2D materials ieee techrxiv.1. IntroductionThe integrated circuits industry (both electronic and photonic) is fundamental to our information age. Chip-scale integrated devices,

featuring compact footprint, low energy consumption, and low cost enabled by large-scale manufacturing, have had a profound influence on our modern li Integration technologies for 2D materials ieee techrxiv

fe. Although complementary’ metal-oxide-semiconductor (CMOS) compatible material platforms, such as silicon, silicon nitride, and silica, have dominat

Integration technologies for 2D materials ieee techrxiv

ed integrated devices, they suffer from limitations intrinsically arising from their material properties, creating challenges for them to meet the eve

TEchRxJyPowered by IEEEFabrication techniques for the integration of 2D materialsThis paper was downloaded from TechRxiv (https://www.techrxiv.org).LI

Integration technologies for 2D materials ieee techrxivvercome these challenges. For example, integrated spintronic transistors have been realized by integrating europium monoxide (EuO) ferromagnetic films

to inject spin-polarized earners into silicon/41 In addition, the integration of organic polymers onto silicon photonic chips has greatly increased t Integration technologies for 2D materials ieee techrxiv

heir processing speed and functionality, which were otherw ise limited by the slow free carrier response/51Since the ground-breaking discovery' of gra

Integration technologies for 2D materials ieee techrxiv

phene in 2004/*1 2D layered materials have attracted tremendous interest, with the material family growing rapidly to include graphene oxide (GO), tra

TEchRxJyPowered by IEEEFabrication techniques for the integration of 2D materialsThis paper was downloaded from TechRxiv (https://www.techrxiv.org).LI

Integration technologies for 2D materials ieee techrxiv2D counterparts exhibit many extraordinary properties, such as ultra-high carrier mobility, layerdependent bandgaps, high anisotropy, broadband and lo

w optical dispersion, and excellent nonlinear optical responses/8"131 In addition, due to the weak out-of-plane van der Waals interactions. 2D materia Integration technologies for 2D materials ieee techrxiv

ls possess surfaces that are free of dangling bonds, thus enabling them to be readily integrated onto chips without stress or restrictions due to latt

Integration technologies for 2D materials ieee techrxiv

ice mismatch/14,151 Their atomically thin geometry is also advantageous for high-density integration and low-power operation. Together with their high

TEchRxJyPowered by IEEEFabrication techniques for the integration of 2D materialsThis paper was downloaded from TechRxiv (https://www.techrxiv.org).LI

Integration technologies for 2D materials ieee techrxivformance beyond what the conventional integrated platforms can possibly oiler.GOBPMXenesFigure 1. Illustration of typical 2D layered materials for on-

chip integration. h-BN: hexagonal boron nitride. TMDCs: transition metal dichalcogenides. GO: graphene oxide. BP: black phosphorus. MOFs: metal-organi Integration technologies for 2D materials ieee techrxiv

c frameworks.MOFsPerovskitesThe incorporation of 2D materials onto conventional integrated circuits combines the best of both worlds (Fig. 1). In the

Integration technologies for 2D materials ieee techrxiv

past decade, there has been significant progress in hybrid integrated devices incorporating 2D materials for a variety of applications such as field-e

TEchRxJyPowered by IEEEFabrication techniques for the integration of 2D materialsThis paper was downloaded from TechRxiv (https://www.techrxiv.org).LI

Integration technologies for 2D materials ieee techrxivonlinear optical devices.!25*291 and sensors.!30'*21 The success of these devices has relied heavily on developing advanced integration fabrication te

chniques - from material synthesis to on-chip transfer, film patterning, and property tuning / modification. While 2D materials have been the subject Integration technologies for 2D materials ieee techrxiv

of many previous reviews,!14,33*3<5]these have predominantly focused on either the material aspects of 2D films or the specificapplications, rather th

Integration technologies for 2D materials ieee techrxiv

an the fabrication techniques. Here, we focus on the latter - review comprehensively the diverse methods used to fabricate chip-scale integrated devic

TEchRxJyPowered by IEEEFabrication techniques for the integration of 2D materialsThis paper was downloaded from TechRxiv (https://www.techrxiv.org).LI

TEchRxJyPowered by IEEEFabrication techniques for the integration of 2D materialsThis paper was downloaded from TechRxiv (https://www.techrxiv.org).LI

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