Development of a 13mhz cavity for an rf implanter

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Nội dung chi tiết: Development of a 13mhz cavity for an rf implanter

Development of a 13mhz cavity for an rf implanter

Doctoral -Degree ThesisDevelopment of a 13MHz Cavity for an RF ImplanterTrinh Thi Til AnilAccelerator and Beam Nano EngineeringUNIVERSITY OF SCIENCE A

Development of a 13mhz cavity for an rf implanter AND TECHNONLOGY40725Development of a 13MHz Cavity for anRF ImplanterTrinh Thi Tn AnilA Dissertation Submitted ill Partial Fulfillment of Requirements

for the Degree of Doctor of Philosophy40725UNIVERSITY OF SCIENCE AND TECHNOLOGY Major of Accelerator and Beam Nano EngineeringSupen isor: Prof. CHO Yo Development of a 13mhz cavity for an rf implanter

ng SubWe hereby approve the PhD thesis of“Trinh Thi Til Anh’’40725Ji-HoJANG________Chairperson of Thesis CommitteeHywk-Jung K WONThesis Committee Memb

Development of a 13mhz cavity for an rf implanter

erVu-ScokKIMThesis Committee MemberYong-Sub CHOThesis Committee MemberWan HONGThesis Committee MemberUNIVERSITY OF SCIENCE AND TECHNOLOGYABSTRACT*Deve

Doctoral -Degree ThesisDevelopment of a 13MHz Cavity for an RF ImplanterTrinh Thi Til AnilAccelerator and Beam Nano EngineeringUNIVERSITY OF SCIENCE A

Development of a 13mhz cavity for an rf implanter is cavity can be used to accelerate particles with mass to charge ratio ệ in the range of 1 < ệ < 4 .The work consists of design, fabrication, assembl

y, tunc and lest the performance of the cavity, rhe cavity is comprised of tank, accelerating electrodes, inductive coil, and Rl system with many sub- Development of a 13mhz cavity for an rf implanter

components to drive the cavity, rhe cavity was analyzed and simulated to get the optimum geometry for maximum energy gain while keeping the powerdissi

Development of a 13mhz cavity for an rf implanter

pation minimum.The cavity was driven by a 13.56MHz RF generator equipped with a solid state amplifier. A signal generator was used to make the frequen

Doctoral -Degree ThesisDevelopment of a 13MHz Cavity for an RF ImplanterTrinh Thi Til AnilAccelerator and Beam Nano EngineeringUNIVERSITY OF SCIENCE A

Development of a 13mhz cavity for an rf implanter ted, rhe critical coupled condition was obtained with a 6.36cm diameter loop. RF characteristics of the'A thesis submitted to committee of the Univers

ity of Science and Technology in a partial fulfillment of the requirement for the degree of Doctor of Philosophy conferred in August 20111 Development of a 13mhz cavity for an rf implanter

Doctoral -Degree ThesisDevelopment of a 13MHz Cavity for an RF ImplanterTrinh Thi Til AnilAccelerator and Beam Nano EngineeringUNIVERSITY OF SCIENCE A